Development of 
Microwave Plasma Reactors for Diamond CVD

The development of optimized reactor systems is an essential key factor for the large scale diamond production.  Cost effective high quality diamond deposition requires a plasma reactor with: 
- extended homogeneous plasmas 
- stable plasma position 
- scalability 
Based on trial and error several reactors have been developed in the past. However, this approach is very time consuming and costly. For this reason we are working on computer programs for the simulation of microwave plasma reactors. 

Theoretical study of the electric field distribution in an ellipsoidal microwave plasma reactor

The simulation tools permit the prediction of the field and plasma distribution in microwave reactors. The reliability of the program was demonstrated by simulating of existing plasma reactors. 
Subsequently these tools were applied to simulate various reactor geometries. One reactor geometry turned out to be very promising. The cavity of this reactor has the shape of an ellipsoid.