CVD Diamond

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	Diamond Materials GmbH

 

Due to its combination of unique physical properties diamond is an outstanding material. Besides its unrivaled hardness diamond exhibits ultrabroadband transparancy ranging from deep UV to the microwave regime, and a thermal conductivity at room temperature which is higher than that of any other material. The excellent mechanical, thermal, optical and insulating properties of diamond became accessible through the advent of low pressure Chemical Vapour Deposition (CVD) techniques which allow diamond in the form of extended films and free-standing wafers to be fabricated.

Fraunhofer IAF has grown large-area (2 to 6 inches in diameter) CVD diamond wafers with thickness beyond 2 mm applying its patented microwave plasma reactor technology. Presently, various ellipsoid plasma reactors with microwave power levels of 6, 8, 12 and 60 kW are used to prepare diamond wafers.  Subsequent double-sided finishing is applied to achieve perfectly smooth and flat surfaces. Phase purity, surface profile, optical absorption, and heat conductivity are routinely characterized.

The application of diamond wafers e.g. as laser windows require extremely flat surfaces and low absorption coefficients; the preparation of diamond heat-spreaders involves several manufacturing steps such as grinding and polishing, laser cutting and metallization; incorporations of additional features such as temperature sensors and resistive heaters into the diamond surface give rise to „smart" diamond heat spreaders for precise device temperature control - meeting such requirement is a strength of Fraunhofer IAF.
 

Fraunhofer has been working on a variety of CVD diamond products which take advantage of the amazing properties of this material.
 

Our R&D Service

• Laser windows for high-power CO₂ lasers
• Microwave transmitting windows for high-power gyrotrons and klystrons
• Dielectric submounts for microwave and millimeter wave ICs
• Heat-spreaders for high-power microelectronic circuits and diode lasers
• Smart heat-spreaders
• Highly refractive microoptics